The book focuses on the need to study and understand the process of technology evolution, highlighting the importance of developing a personal paradigm for perceiving the technological process of developing modern knowledge as the basis for human survival and unity in a warring state. Chapter 1: Introduction to MEMS * MEMS is a rapidly growing field that combines microelectronics and micromechanics to create miniature devices with a wide range of applications. * The book provides an overview of the current state of MEMS technology and its potential for future advancements. Chapter 2: Mechanical Properties of MEMS * The chapter discusses the mechanical properties of MEMS, including stiffness and compliance, and how they are affected by fabrication technologies. * Closed-form solutions and simplified engineering formulas are derived for lumped parameter stiffness and compliance properties of flexible components.

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